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NACHI-FUJIKOSHI Corp. 산업용로봇 SJ80C-18D/24D, SJ120C-28D/28S - Clean Room Robot
모델명 SJ80C-18D/24D, SJ120C-28D/28S - Clean Room Robot
카테고리 산업용로봇
제조사 NACHI-FUJIKOSHI Corp.
출시년도 미입력
사후관리 제조사 정책에 준함
교육지원 별도 협의
기본사양

Large-sized glass substrate transfer robot

  • Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates.

Fastest motion in its class

  • Rotation speed: Maximum 180°/sec
  • Up and down speed: Maximum 1,050 mm/sec

Unique linkage structure applied to up and down axis

  • High-rigidity structure for minimizing flexure and vibration
  • Belt-less structure ensures high reliability and safety

Moving cables are completely enclosed in the arm

  • The enclosed design prevents particle generation and looks good too
Controller
  • AX30
상세스펙
Robot model SJ80C-18D-01 SJ80C-24D-01
Air Cleanliness Class 10 (0.3μm)*1
Number of axes 4
Drive System AC Servo Drive
Maximum Stroke X1 Back & 
Forth 1
3,670mm
X2 Back & 
Forth 2
3,670mm
θ Rotation +2.53 to -3.40rad
(+145° to -195°)
Z Up & 
Down
1,800mm 2,400mm
Maximum Velocity X1 Back & 
Forth 1
3,000mm/sec
X2 Back & 
Forth 2
3,000mm/sec
θ Rotation 3.14rad/sec (180°/sec)
Z Up & 
Down
1,100mm/sec 1,450mm/sec
Payload Weight 80kg per arm (total 135kg)
Repeatability +/-0.3mm
Ambient Temperature 0 to 35°C
Installation Conditions Floor Mount
Robot Body Weight 1,175kg 1,200kg

*1 At flange surface on robot tip.
1rad=57.3°  1N=0.102kgf


Robot model SJ120C-28D-01 SJ120C-28S-01
Structure Articulated model 
(vertical linkage type robot)
Air Cleanliness Class 10 (0.3μm) *2
Number of axes 4 3
Drive System AC Servo Drive
Maximum Stroke X1 Back & 
Forth 1
4,480mm(+2,250 to -2,230mm)
X2 Back & 
Forth 2
4,480mm
(+2,250 to -2,230mm)
-
θ Rotation +3.40 to -2.53rad
(+195° to -145°)
Z Up & 
Down
2,800mm
Maximum Velocity X1 Back & 
Forth 1
3,600mm/sec
X2 Back & 
Forth 2
3,600mm/sec -
θ Rotation 3.14rad/sec (180°/sec)
Z Up & 
Down
1,050mm/sec
Payload Weight X1 Back & 
Forth 1
Max. 90kg Max. 120kg
X2 Back & 
Forth 2
Max. 120kg -
Allowable moment X1 Back & 
Forth 1
720N·m 780N·m
X2 Back & 
Forth 2
780N·m -
Allowable moment 
of intertia
X1 Back & 
Forth 1
135kg·m2 165kg·m2
X2 Back & 
Forth 2
165kg·m2 -
Repeatability +/-0.3mm +/-0.3mm
Ambient Temperature 0 to 35°C
Installation Conditions Floor Mount
Robot Body Weight 1,880kg 1,680kg

*2 At flange surface on robot tip.
1rad=57.3°  1N=0.102kgf

 
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